Laser Grooving Coating

Laser Grooving Solution is a water-based polymer solution, which could be spin-coated on the surface of the integrated circuit wafer to form a temperature-resistant polymer thin film.  During laser grooving process, the fluid can improve production yield and eliminate quality problems such as cutting track cracking and dielectric layer peeling.

• Achieve cooling effect through vaporization of organic materials and improve laser grooving resolution
• Rigid polymer film, prevents debris from splashing and scratching integrated circuits on wafer.
• Temporary coating, easily removed by rinsing with pure water